Special Gas Control Panels: The Core of Pressure Regulation and Safety Control

1. Basic Manual Control Panel

This panel integrates manual ball valves, a pressure regulator, and a pressure gauge. Operators adjust outlet pressure and control gas flow manually. Its simple structure makes it easy to operate and maintain. Single- or dual-stage regulation circuits are available for different pressure accuracy requirements.

Applications: Lab pipelines, small-to-medium production lines, and standby gas switching stations with on-site personnel.

Suitable gases: Nitrogen (N₂), argon (Ar), helium (He), carbon dioxide (CO₂), and other inert or non-corrosive gases.

2. Remote Pressure Monitoring Panel

Built on the basic panel, this type adds pressure transmitters that convert inlet/outlet pressure signals into standard 4–20mA electrical signals for remote monitoring at a central control system. Local gauges and manual valves are retained for on-site operation. Supports real-time alarms and data logging.

Applications: Unmanned gas stations, remote-monitored specialty gas rooms, continuous production lines with strict pressure stability requirements.

Suitable gases: Toxic or corrosive gases such as hydrogen sulfide (H₂S) and ammonia (NH₃), as well as flammable gases like hydrogen (H₂).

3. Solenoid Valve Auto-Shutoff Panel

This panel is equipped with solenoid shutoff valves that respond to control system signals for remote open/close operation and emergency gas cutoff. It integrates with fire alarms and gas detection systems to automatically shut off the gas supply under abnormal conditions.

Applications: Fully automated specialty gas cabinets, hazardous gas delivery systems requiring emergency shutoff, and dual-source automatic switchover systems.

Suitable gases: Pyrophoric, highly toxic, or strongly corrosive gases such as silane (SiH₄), phosphine (PH₃), and chlorine (Cl₂).

4. Dual-Source Auto-Switchover Panel

Equipped with primary and backup gas source connections, this panel automatically switches to the backup supply when the primary source runs out — with no interruption or pressure fluctuation. It incorporates dual-stage regulators, check valves, and pressure monitoring modules.

Applications: Continuous production lines and critical process stations where gas supply cannot be interrupted, such as semiconductor deposition and etching.

Suitable gases: SiH₄, NH₃, CF₄, and other continuously required process gases.

5. Gas Mixing and Ratio Control Panel

Integrating mass flow controllers (MFCs), proportional valves, and a mixing chamber, this panel precisely controls the flow ratio of two or more gases, achieving a blending accuracy of ±1% FS.

Applications: CVD, plasma etching, gas-shielded welding, and laboratory standard gas preparation.

Suitable gases: H₂/N₂, Ar/O₂, and other binary or multi-component gas mixtures.

6. High-Purity Specialty Gas Panel (VCR Connection)

Constructed from 316L stainless steel with electropolished (EP) inner surfaces (Ra ≤0.25μm), this panel uses VCR metal face-seal fittings throughout to eliminate leaks and contamination. Equipped with high-purity regulators and in-line filters, it meets ppb-level purity requirements. Each unit is helium leak-tested and particle-checked before shipment.

Applications: Semiconductor wafer fabrication, advanced packaging, photovoltaic cells, and cleanroom gas delivery.

Suitable gases: High-purity Ar, He, N₂, silane (SiH₄), trichlorosilane (SiHCl₃), and other carrier or reactive gases.